Freescale Semiconductor

Entries

• in MEMs Sensors

  Freescale Semiconductor designs and manufactures MEMS-based sensors found in automotive electronics, medical equipment, hard disk drives, computer peripherals, wireless devices, and smart portable electronics. Some of the sensors feature HARMEMS technology, which has a 25 um movable element thickness for accuracy within automotive safety applications.

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• in Piezoresistive Pressure Sensors

  Freescale Semiconductor offers MEMS bulk micromachining. MEMS bulk micromachining involves a process whereby the single crystal silicon is etched to form three-dimensional MEMS devices. This is a subtractive process in which the silicon in the wafer is specifically removed using antisotropic chemistry. Using this bulk micromachining method, sensors such as piezoresistive pressure sensors have been manufactured in high volume.

  • MEMS Bulk Micromachining